EMO Hannover 2019, 16 - 21 September

    EMO Hannover 2019, 16 - 21 September
    Homepage>Exhibitors & Products >Positioning system - VULCANO2 STACKED PLATFORMS

    Positioning system - VULCANO2 STACKED PLATFORMS

    Logo Positioning system - VULCANO2 STACKED PLATFORMS
    Logo Positioning system - VULCANO2 STACKED PLATFORMS

    Product description

    VULCANO2 is a gantry stacked-axes architecture based on mechanical bearing coupled to high-end optical encoders. Use of ETEL renowned iron-core motors, along with innovative design principles, allows reaching high dynamics at much improved geometrical and motion performance levels.

    With focus on easing semiconductor applications, the platform remains a match to all diverse markets and needs requiring solutions for higher dynamics; in fact even its best in class footprint excels to maximize its overall Cost of Ownership value proposition. Customers, aiming to reach higher throughput, duty cycles or to serve heavier payloads with no loss of repeatability or of accuracy, can confidently adopt a standard VULCANO2 or a derived customized solution.

    VULCANO2 represents also a perfect solution to all use cases where dynamics, duty cycles and payloads are not so stringent, though positioning accuracy must be established for very long times: delivering several hours of u-level navigation accuracy is no longer a dream but a solid reality from this new offering from ETEL.

    The use of this platform is suitable for, but not limited to:

    - Wafer Process Control applications such as Overlay Metrology, Critical
    - Dimension and Thin film Metrology
    - Back-end: flip-chip processes made on large panels/substrates


    - Compact footprint
    - Payload up to 80 kg
    - Nanometer level position stability
    - High dynamics
    - Excellent bidirectional repeatability and position stability
    - ISO 2 clean room compatibility

    Product website

    Hall 9, Stand I32

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