EMO Hannover 2019, 16 - 21 September

    EMO Hannover 2019, 16 - 21 September
    Homepage>Exhibitors & Products >Positioning system - VULCANO XYZ3TH STACKED PLATFORM

    Positioning system - VULCANO XYZ3TH STACKED PLATFORM

    Logo Positioning system - VULCANO XYZ3TH STACKED PLATFORM

    Product description

    The Vulcano XYZ3TH platform is made up of the standard Vulcano XY outfitted with the Z3TH combined module. This 4 degrees of freedom module, provides 364° Theta rotation, double Z-axes, a coarse one for wafer loading and unloading, and a fine one for focus adjustment, as well as a Tip and Tilt correction over ±0.1°.

    Characteristics
    - Compact footprint
    - Nanometer position stability
    - High dynamics: 2.5 g, 1.5 m/s
    - Low move and settle times
    - ISO1 clean room compatible
    - Tip-Tilt correction over ±0.1°
    - Double Z integration
    - Built-in gravity compensator in Z
    - Outstanding Z straightness
    - Enhanced Z repeatability and jitter
    - Ability to correct stage flatness
    - Built-in vacuum supply at chuck level

    Ask for the corresponding Integration Manual for more information.

    Product website

    Hall 9, Stand I32

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