EMO Hannover 2019, 16 - 21 September

    EMO Hannover 2019, 16 - 21 September
    Homepage>Exhibitors & Products >Positioning system - VULCANO XYT STACKED PLATFORM

    Positioning system - VULCANO XYT STACKED PLATFORM

    Logo Positioning system - VULCANO XYT STACKED PLATFORM

    Product description

    The Vulcano XYT platform is made up of the standard Vulcano XY outfitted with the RTTB rotary module which includes high resolution encoder coupled to an outstanding mechanical bearing.
    The use of this platform is suitable for, but not limited to:
    -Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology
    - Back-end: specific flip-chip processes made on large panels/substrates

    Characteristics
    - Compact footprint
    - Nanometer position stability
    - Short move and settle times
    - High dynamics
    - High bidirectional repeatability
    - High position stability
    - ISO class 1 clean room compatibility

    Ask for the corresponding Integration Manual for more information.

    Product website

    Hall 9, Stand I32

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