EMO Hannover 2019, 16 - 21 September

    EMO Hannover 2019, 16 - 21 September
    Homepage>Exhibitors & Products >Combined module - ZT COMBINED MODULE

    Combined module - ZT COMBINED MODULE

    Logo Combined module - ZT COMBINED MODULE

    Product description

    The ZT box is a module combining two degrees of freedom, in Z and Theta, within one single unit. Two actuations are possible along the Z direction, a coarse one and a fine one. This module can be used in a standalone mode or mounted on top of an XY platform. This module is especially well suited for wafer process control applications such as thin film metrology, critical dimensions, etc.

    - Infinite rotation
    - Built-in vacuum supply at wafer chuck level
    - Built-in gravity compensator
    - ISO1 clean room compatible thanks to vacuum suction
    - Coarse Z axis with 12 mm stroke for wafer loading/unloading and fine Z with 4 mm stroke for focus adjustment
    - Version without a coarse Z can be done
    - Very good Z jitter as well as move and settle

    Main specifications
    - Bidirectional repeatability: ±0.3 µm for Z and ±2 arcsec for T
    - Position accuracy: ±0.6 µm for Z and ±3 arcsec for T
    - Speed up to: 0.1 m/s for Z and 15.7 rad/s for T
    - Acceleration up to: 0.2 g for Z and 104.7 rad/s² for T
    - Position stability: ±5 nm for Z and ±0.2 arcsec for T
    - Load capacity: 1 kg

    Ask for the corresponding Integration Manual for more information.

    Product website

    Hall 9, Stand I32

    More products from ETEL

    Show more

    Stored items


    Server communication error: Item could not be saved.